Accession Number:

ADP006686

Title:

Chemical Aspects of Pb-Zr-Ti Oxide Thin Film Synthesis by PE-MOCVD Below 500c,

Descriptive Note:

Corporate Author:

ARIZONA STATE UNIV TEMPE DEPT OF CHEMISTRY

Report Date:

1991-04-05

Pagination or Media Count:

27.0

Abstract:

The general features of the chemistry in synthesizing lead zirconium titanate thin films by PE-MOCVD are discussed based on a preliminary experimental investigation. A qualitative model was constructed as a guide for optimizing the formation of the perovskite phase in the as-deposited condition. This was based on concepts of crystal chemistry of the perovskite and pyrochlore structures and the observed deposition kinetics. Currently, thin films containing up to 92 vol perovskite have been formed below 500 deg C in the as-deposited condition. Sufficient latitude remains in adjusting the operating parameters that the formation of phase pure perovskite is considered possible. A thermodynamic analysis of the solid state suggests that low temperature thermal equilibration will yield minority lead-rich phases. Consequently, nonequilibrium processing techniques such as plasma processing are considered necessary. Ferroelectric hysteresis was observed for films receiving post deposition anneals.

Subject Categories:

  • Industrial Chemistry and Chemical Processing
  • Ceramics, Refractories and Glass

Distribution Statement:

APPROVED FOR PUBLIC RELEASE