Accession Number:

ADP006684

Title:

Statistical Investigation of SOL-GEL Lead Titanate (PT) Processing,

Descriptive Note:

Corporate Author:

COLORADO UNIV AT COLORADO SPRINGS

Report Date:

1991-04-05

Pagination or Media Count:

14.0

Abstract:

There are three stages involved in the successful application of a thin film sol-gel oxide, 1 solution synthesis, 2 application, and 3 post application treatments. Each stage contains many processing steps that can be varied in order to optimize the thin film for various applications. This work entails a statistical investigation of a thin film sol-gel PT process for use in memory applications. Statistical experimental design yields a maximum amount of information for a minimum amount of effort. Candidate controllable variables factors and responses are first identified. A screening experiment is then conducted to identify the most important factors based on the identified responses. A full-factorial experiment is then conducted to further evaluate the important factors. Finally, a response surface analysis is performed in order to optimize the important factors. Responses such as switching charge 2Pr, endurance and dielectric measurements are used to analyze the sol-gel lead titanate.

Subject Categories:

  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Electricity and Magnetism

Distribution Statement:

APPROVED FOR PUBLIC RELEASE