Statistical Investigation of SOL-GEL Lead Titanate (PT) Processing,
COLORADO UNIV AT COLORADO SPRINGS
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There are three stages involved in the successful application of a thin film sol-gel oxide, 1 solution synthesis, 2 application, and 3 post application treatments. Each stage contains many processing steps that can be varied in order to optimize the thin film for various applications. This work entails a statistical investigation of a thin film sol-gel PT process for use in memory applications. Statistical experimental design yields a maximum amount of information for a minimum amount of effort. Candidate controllable variables factors and responses are first identified. A screening experiment is then conducted to identify the most important factors based on the identified responses. A full-factorial experiment is then conducted to further evaluate the important factors. Finally, a response surface analysis is performed in order to optimize the important factors. Responses such as switching charge 2Pr, endurance and dielectric measurements are used to analyze the sol-gel lead titanate.
- Manufacturing and Industrial Engineering and Control of Production Systems
- Electricity and Magnetism