Accession Number:

ADP006660

Title:

Study of the Optical Properties of RF Sputtered Lithium Niobate Thin Films,

Descriptive Note:

Corporate Author:

RICE UNIV HOUSTON TX DEPT OF ELECTRICAL AND COMPUTER ENGINEERING

Report Date:

1991-04-05

Pagination or Media Count:

10.0

Abstract:

Lithium niobate optical waveguides were fabricated on 110, and 100 sapphire by both diode and magnetron rf sputtering at 500-600 deg C in a flowing Ar02 Atmosphere. Light coupling utilizing a rutile prism coupler was demonstrated. The propagation losses were obtained by measuring the scattered light from the surface using a fiber probe. The mode angles were also measured and used to calculate the thickness and the refractive indices of each sample. X-ray diffraction studies and the birefringence observed in the films have confirmed the crystalline nature the films. The lowest value of attenuation of the He-Ne laser light propagating in the lithium niobate waveguide sputtered on sapphire was determined to-be 1.1 - 0.1 dBcm. In addition, the lowest attenuation in lithium niobate thin film waveguides sputtered on SiO2Si substrates was measured to be 2.3 dBcm using end-fire coupling and fiber probing techniques.

Subject Categories:

  • Electricity and Magnetism
  • Ceramics, Refractories and Glass
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE