Preparation of PbTiO sub 3 Thin Films by Laser Ablation,
OSAKA UNIV (JAPAN)
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PbTiO3 thin films have been deposited on Si or Pt substrates by laser ablation method using ArF excimer or YAG laser. Species evaporated in the vacuum have been studied by mass analysis, and the measured Pb and Ti are not oxidized. Spacial distributions of the deposition rates on the substrate have been studied as a parameter of laser fluence. The excimer laser gives better films than the YAG. Perovskite films have been obtained at substrate temperature approximately 400 deg C and appropriate ambient O2 gas pressure.
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- Ceramics, Refractories and Glass