Ferroelectric Memory Programs in Canada,
QUEEN'S UNIV KINGSTON (ONTARIO) DEPT OF PHYSICS
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Thin film PZT ferroelectrics have been fabricated in Canada since 1976 by magnetron sputtering and more recently by acetate-based sol gel processing and are now being considered for implementation into commercial communications systems. Processing based on rapid thermal annealing has shown marked advantages for crystallization into the required perovskite phase. Applications based on the piezoelectric properties of PZT films are shown to have an interesting potential for a range of devices.
- Electricity and Magnetism
- Electrical and Electronic Equipment
- Ceramics, Refractories and Glass
- Manufacturing and Industrial Engineering and Control of Production Systems