A systematic investigation has been conducted to evaluate the role of oxygen in modifying the microstructure and properties of Ti-6Al-2Cb-1Ta-1Mo alloy. Variation of oxygen 0.075 to 0.290 wt. percent was found to significantly reduce the prior-beta grain size without discernable changes in the transformed widmanstatten structure or crystallographic texture in the beta processed condition. Resulting from alpha stabilization effect, oxygen increases the beta transus temperature at an approximate rate of 13 degree C per 0.1 wt. percent increase in oxygen content. Oxygen, within the range of this investigation, solution strengthens the alloys by linearly increasing the overall hardness and tensile properties. Variation in oxygen was found to alter both low temperature resistivity and superconducting temperature. For example, the superconducting temperature is found to increase from 3.1K to 4K when oxygen concentration changes from 0.075 to 0.290 wt. percent.