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Surface Analysis of Diamond-Like Carbon Films,
NAVAL WEAPONS CENTER CHINA LAKE CA
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There has been considerable interest recently in carbon films because of several unusual properties reported. Some of these properties, such as the optical absorption edge and the valence-band structure, are similar to those of diamond. Thus the appelation diamond-like carbon DLC films has developed, along with a host of suggested applications for films with such unusual properties. DLC films have been shown to be much harder than graphite or amorphous-carbon films, suggesting application in wear reduction. The wide band gap suggests application as an optical, passivating or insulating coating. Their good physical strength and low atomic number has led to the use of DLC films as free-standing windows for high-energy ion beams. In this report we discuss several surface-analysis techniques as applied to study the chemical and structural properties of DLC films, and present results obtained from several films from four different laboratories.
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