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Some Aspects of the Growth and Characterization of 'Diamond Like' Carbon Films,
CASE WESTERN RESERVE UNIV CLEVELAND OH DEPT OF CHEMICAL ENGINEERING
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This paper covers three topics 1 the general properties and categorization of types of carbon films, 2 a discussion of some factors that must influence the growth of the so called diamond like films, 3 some results of characterization of diamond like films grown from low energy ion beams.
APPROVED FOR PUBLIC RELEASE