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Accession Number:
ADP002466
Title:
Sputtered C-Axis Inclined Piezoelectric Films and Shear Wave Resonators,
Descriptive Note:
Corporate Author:
IOWA STATE UNIV AMES
Report Date:
1983-01-01
Pagination or Media Count:
7.0
Abstract:
Sputtered piezoelectric films are being studied for potential application to VHF through microwave frequency acoustic wave devices. This paper reports on the growth and characterization of C-axis inclined ZnO and A1N films for shear wave resonators. Orientation relationships for shear wave excitation were calculated for these films which suggest a nearly pure shear wave could be excited with films having C-axis orientation approximately 45 deg. from the surface normal. At other angles, quasi-shear and quasi-longitudinal waves are excited. The well oriented ZnO or A1N films with C-axis inclined from the film normal were grown in a reactive dc planar magnetron sputtering system having an auxiliary anode structure. These films were evaluated by scanning electron microscopy SEM and BAW device measurements. The columnar structure of the C-axis crystallites, inclined from the Si substrate normal, was clearly visible in SEM. Films having C-axis inclination angles up to 45 deg. and thicknesses up to 10 microns have been obtained.
Distribution Statement:
APPROVED FOR PUBLIC RELEASE