Self-Aligned Integrally Gated Nanofilament Field Emitter Cell and Array
Patent application, Filed 9 Mar 2001
DEPARTMENT OF THE NAVY WASHINGTON DC
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The present invention discloses a new field emitter cell and array consisting of groups of nanofilaments forming emitter cathodes. Control gates are microprocessed to be integrally formed with groups of nanofilament emitter cathodes on a substrate. Groups of nanofilaments are grown directly on the substrate material. As a result, the control gates and groups of nanofilaments are self-aligned with one another.
- Electrical and Electronic Equipment
- Electricity and Magnetism