Pulser Laser Deposition of Transparent Conducting Thin Films on Flexible Substrates
Patent application, filed 19 Jan 2001
DEPARTMENT OF THE NAVY WASHINGTON DC
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The invention relates to the deposition of transparent conducting thin films, such as transparent conducting oxides TCO such as tin doped indium oxide ITO and aluminum doped zinc oxide AZO on flexible substrates by pulsed laser deposition. The coated substrates are used to construct low cost, lightweight, flexible displays based on organic light emitting diodes OLEDs.
- Electrical and Electronic Equipment