Rapid, High-Resolution Scanning of Flat and Curved Regions for Gated Optical Imaging
Patent Application, Filed 31 Mar 1998
DEPARTMENT OF THE NAVY WASHINGTON DC
Pagination or Media Count:
A scanning system for scanning in first and second dimensions a desired surface topology of a sample, the scanning device comprising a light source for producing a collimated light beam a first scanning device responsive to the collimated light beam from the light source for producing a first scanned beam in a first dimension with a constant optical path length and a second scanning device coupled between the first scanning device and the sample for focusing and scanning the first scanned beam in a second dimension onto the surface region of the sample to cause the collimated light beam to scan the surface topology of the sample with a constant optical path length in each of the first and second dimensions of the desired topology of the sample. In a second embodiment of the invention, a beam of light is focused by a first lens before a scanner and the scanner is rotated. Second and third lenses arranged in a 4 - f combination are used to image rotated focal spots along a spherical convex surface of a sample while the optical path length stays constant. Slow scanning in other dimensions can be performed by mechanical means.
- Optical Detection and Detectors