Method of Improving the Spectral Respones and Dark Current Characteristics of an Image Gathering Detector
Patent, Filed 5 Jul 94, patented 24 Nov 98
DEPARTMENT OF THE NAVY WASHINGTON DC
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A method of simultaneously improving the spectral response and dark current characteristics of an image gathering detector is disclosed. The method uses an excimer laser to redistribute and activate ion implanted dopant species in the backside of an image gathering device such as a backside-illuminated CCD. Alternately, the excimer laser is used to incorporate dopants from a gaseous ambient into the backside of the image gathering device and simultaneously redistribute and activate the dopants. The redistribution of the dopant is controlled by the laser pulses and provides for a peak dopant concentration at the back surface of the image gathering device which provides for improved spectral response and simultaneously improves dark current characteristics.
- Electrical and Electronic Equipment
- Lasers and Masers