Monolithic Piezoelectric Accelerometer
Patent, Filed 27 Nov 96, patented 9 Feb 99
DEPARTMENT OF THE NAVY WASHINGTON DC
Pagination or Media Count:
A monolithic piezoelectric accelerometer of the longitudinal type having a mass element, a piezoelectric accelerometer sensor element and electrodes interconnecting the mass and sensor elements, in which the mass and sensor elements are formed as a monolithic structure. Included is the method for making the monolithic piezoelectric accelerometer.
- Electrical and Electronic Equipment