Large Area Plasma Processing System (LAPPS)
Patent, Filed 27 Aug 97, patented 23 Feb 99
DEPARTMENT OF THE NAVY WASHINGTON DC
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The large area plasma processing system LAPPS is a system wherein an electron beam is used to produce a plasma. A large area uniform plasma is produced where length and width can be comparable 10s-100s of cm and very much larger than the plasma thickness approx. 1 cm. The plasma distribution is created independent of the surface to be processed and the bias applied to the surface. The beam produced plasma has a low intrinsic electron and excitation temperature plasma, allowing the process to be conducted with better control of free radical production. A material, such as a substrate, being processed may be placed in close proximity to plasma with controlled ion bombardment or without substantial bombardment by energetic ions. The system also offers a large available area for gas inflow and removal from the processing chamber and cathode chamber so as not to contaminate the material being processed or damage the cathode.
- Plasma Physics and Magnetohydrodynamics