Photon Controlled Decomposition of Nonhydrolyzable Ambients
Patent, Filed 7 Jun 95, patented 2 Mar 99
DEPARTMENT OF THE NAVY WASHINGTON DC
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A method and apparatus to decompose nonhydrolyzable ambients such as chlorofluorocarbons and nitrogen trifluoride which enables the conventional disposal of their byproducts are disclosed. It employs photo-decomposition of the nonhydrolyzable ambient using UV light and a mediating species to allow chemical reactions to occur which form an effluent which is hydrolyzed by conventional methods. This abatement process is amenable to point-of-use decomposition systems required for modular cluster tool systems used in microelectronic device fabrication.
- Radiation and Nuclear Chemistry
- Air Pollution and Control