Accession Number:

ADD019379

Title:

Photon Controlled Decomposition of Nonhydrolyzable Ambients

Descriptive Note:

Patent, Filed 7 Jun 95, patented 2 Mar 99

Corporate Author:

DEPARTMENT OF THE NAVY WASHINGTON DC

Report Date:

1999-03-02

Pagination or Media Count:

9.0

Abstract:

A method and apparatus to decompose nonhydrolyzable ambients such as chlorofluorocarbons and nitrogen trifluoride which enables the conventional disposal of their byproducts are disclosed. It employs photo-decomposition of the nonhydrolyzable ambient using UV light and a mediating species to allow chemical reactions to occur which form an effluent which is hydrolyzed by conventional methods. This abatement process is amenable to point-of-use decomposition systems required for modular cluster tool systems used in microelectronic device fabrication.

Subject Categories:

  • Radiation and Nuclear Chemistry
  • Air Pollution and Control

Distribution Statement:

APPROVED FOR PUBLIC RELEASE