Accession Number:

ADD019274

Title:

Surface Modification of Synthetic Diamond for Producing Adherent Thick and Thin Film Metallizations for Electronic Packaging

Descriptive Note:

Patent, Filed 25 Apr 97, patented 29 Dec 98

Corporate Author:

DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s):

Report Date:

1998-12-29

Pagination or Media Count:

13.0

Abstract:

An article and a method of making surface modified synthetic diamond substrates at temperatures below 500 deg C for electronic packaging applications are described. The article consists of a synthetic diamond substrate, the surface of which has been modified by providing an adherent thin coating of a ceramic alumina material so as to enable metallization of synthetic diamond by current industrial methods. The method of surtbce modification comprises deposition of a thin transition metal layer on the synthetic diamond substrate prior to low temperature reactive vapor deposition of aluminum followed by annealing in an oxygen atmosphere.

Subject Categories:

  • Electrical and Electronic Equipment
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE