RE(x)M(1-x)Mn(y)O(delta) Films for Microbolometer-Based IR Focal Plane Arrays
Patent, Filed 26 Jun 97, patented 29 Dec 98
DEPARTMENT OF THE NAVY WASHINGTON DC
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Microbolometers can be made with a thin film composition of matter having a large temperature coefficient of resistance TCR as compared to the same material in the hulk form. The composition is a manganite of the formula RExM1-xMnyOdelta where RE is Y and the rare earths such as La, Ce, Pr, Nb, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and combinations thereof, M is a divalent metal such as Ca, Sr, Ba, Pb, and combinations thereof, x is less than 1, y is from about 0.75 to about 1.5, and delta is from about 2.5 to about 4.0. The microbolometer is made by applying a thin film of the composition on to a substrate such as SiNx and annealing the deposited film to remove inhomogeneities and to decrease the defects so as to increase the TCR.
- Inorganic Chemistry
- Infrared Detection and Detectors