Lactic Acid Treatment of InP Materials
Patent, Filed 8 May 96, patented 30 Jun 98
DEPARTMENT OF THE NAVY WASHINGTON DC
Pagination or Media Count:
The use of lactic acid or its derivative in compositions to etch or polish materials containing indium phosphide results in treated surfaces that have reduced surface roughness compared to the surfaces treated with compositions devoid of lactic acid or its derivative. Indium phosphide surfaces treated with compositions containing lactic acid can have treated surfaces that are smooth or mirror-like, meaning that surface irregularities thereon are less than about 50 A.
- Inorganic Chemistry
- Electrical and Electronic Equipment