Deposition of Diamonds on Oxidizable Material
Patent, Filed 14 May 97, patented 12 May 98
DEPARTMENT OF THE NAVY WASHINGTON DC
Pagination or Media Count:
In a process for depositing a diamond layer from an activated gaseous mixture including hydrogen and carbon where the process is facilitated by the inclusion of oxygen in the mixture and the diamond is deposited directly on a material, such as a nitride interlayer, which is oxidized by oxygen in the activated mixture, an activated mixture without oxygen is provided at the beginning of the depositing of the diamond layer and an activated mixture containing oxygen is provided when the diamond layer attains a thickness sufficient to protect the material from oxidation by the oxygen in the activated mixture.
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