Accession Number:

ADD019008

Title:

Specular Reflection Optical Bandgap Thermometry

Descriptive Note:

Patent Application, Filed 17 Jul 98

Corporate Author:

DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s):

Report Date:

1998-07-17

Pagination or Media Count:

46.0

Abstract:

A new technique of optical bandgap thermometry allows one to accurately measure the temperature of semiconductor samples by using the temperature dependent reflective properties of the samples The disclosed technique uses specular reflection at an oblique angle of incidence. Light from a light source such as quartz halogen lamp is chopped and focused by a lens. The light then is focused onto the sample at an oblique angle of incidence. The light is specularly reflected by the sample and is focused by a lens into a spectrometer The spectrometer is used to determine the spectrum of the light reflected from the sample. The reflectance varies with temperature and the temperature of the sample is calculated as a function of the reflectance spectrum.

Subject Categories:

  • Test Facilities, Equipment and Methods
  • Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE