Accession Number:

ADD019002

Title:

Inter-Level Dielectrics with Low Dielectric Constants

Descriptive Note:

Patent, Filed 28 Feb 97, patented 31 Mar 98

Corporate Author:

DEPARTMENT OF THE NAVY WASHINGTON DC

Report Date:

1998-03-31

Pagination or Media Count:

8.0

Abstract:

A metallization is coated with a network polymer. The network polymer may he either a cross-linked polyfluorinated polyallylether-polyhydromethylsiloxane copolymer or a network polymer formed from cross-linked fluoromethylene cyanate ester monomers. These polymer networks are resistant to the diffusion of a metallization, such as copper, therethrough.

Subject Categories:

  • Polymer Chemistry
  • Electrical and Electronic Equipment
  • Coatings, Colorants and Finishes
  • Electricity and Magnetism

Distribution Statement:

APPROVED FOR PUBLIC RELEASE