Accession Number:

ADD018782

Title:

Inter-Level Dielectrics with Low Dielectric Constants

Descriptive Note:

Patent, Filed 14 Jul 95, patented 26 Aug 97

Corporate Author:

DEPARTMENT OF THE NAVY WASHINGTON DC

Report Date:

1997-08-26

Pagination or Media Count:

8.0

Abstract:

A metallization is coated with a network polymer. The network polymer may he either a cross linked polyfluorinated polyallylether-polyhydromethysiloxane copolymer or a network polymer formed from cross linked fluoromethyl ene cyanate ester monomers. These polymer networks are resistant to the diffusion of a metallization, such as copper, therethrough.

Subject Categories:

  • Coatings, Colorants and Finishes

Distribution Statement:

APPROVED FOR PUBLIC RELEASE