Inter-Level Dielectrics with Low Dielectric Constants
Patent, Filed 14 Jul 95, patented 26 Aug 97
DEPARTMENT OF THE NAVY WASHINGTON DC
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A metallization is coated with a network polymer. The network polymer may he either a cross linked polyfluorinated polyallylether-polyhydromethysiloxane copolymer or a network polymer formed from cross linked fluoromethyl ene cyanate ester monomers. These polymer networks are resistant to the diffusion of a metallization, such as copper, therethrough.
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