Accession Number:

ADD015930

Title:

Volatile CVD Precursors Based on Copper Alkoxides and Mixed Group IIA-Copper Alkoxides.

Descriptive Note:

Patent, Filed 31 Jan 92, patented 25 May 93,

Corporate Author:

DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s):

Report Date:

1993-05-25

Pagination or Media Count:

3.0

Abstract:

Fluorinated alkoxy compounds of copper, copper-calcium, copper-strontium, and copper-barium having a certain structure in which 1 less than or equal w less than or equal 4 R is a fluorinated alkyl group x greater than or equal 1 Y is an alkoxy or alkyl group without beta-hydrogen Y greater than or equal 0 w less than or equal xy less than or equal 2w L is a Lewis base 1 less than or equal z less than or equal 2w M is Ca, Sr, or Ba and 1 less than or equal a less than or equal 4 1 less than or equal b less than or equal 4 b 2a less than or equal c less than or equal 2ba, have exceptionally high volatilities, and hence low vaporization or sublimation temperatures, at 10 exp-5 torr. They are superior precursor compounds for chemical vapor deposition of thin films on substrates under vacuum, and for sol-gel processing.

Subject Categories:

  • Organic Chemistry
  • Physical Chemistry
  • Laminates and Composite Materials
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE