Monocrystalline Germanium Film on Sapphire.
Patent, Filed 1 Jun 90, Patented 27 Apr 93,
DEPARTMENT OF THE NAVY WASHINGTON DC
Pagination or Media Count:
A monocrystalline germanium film is grown on a sapphire substrate with a I 102 orientation. The substrate is first pretreated to restructure the 1102 surface plane. Typically, restructuring is accomplished by either an anneal at high temperature or ion bombardment. A monocrystalline germanium layer is grown on the pretreated surface by a vapor deposition process such as molecular beam epitaxy or chemical vapor deposition.
- Physical Chemistry
- Laminates and Composite Materials