Oriented, Single-Phase Thin Films of Potassium Tantalate-Niobate.
Patent Application, Filed 25 Sep 92,
DEPARTMENT OF THE NAVY WASHINGTON DC
Pagination or Media Count:
An oriented, essentially single phase perovskite film of potassium tantalate-niobate is formed. Preferred substrate surfaces for deposition include SrTiO3 110 and 100 and MgO 100. Films formed on SrTiO3 110 and 100 are epitaxial. The films are formed by applying a solution of an organometallic complex of tantalum, potassium and niobium onto a substrate surface. The deposited solution is dried and organics removed by heating. The thus formed film is then transferred to an oven preheated to a temperature of between about 700 deg C and 750 deg C. After cooling, further layers of single phase, oriented potassium tantalate-niobate may be deposited by repeating the same procedures. The deposited films can form form useful device for microelectronics and electro-optics. Author
- Electrical and Electronic Equipment
- Electricity and Magnetism
- Inorganic Chemistry