Planar Gallium Arsenide NPNP Microwave Switch.
Patent, filed 27 Jul 90, Patented 4 Feb 92,
DEPARTMENT OF THE NAVY WASHINGTON DC
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A microwave switch is provided for controlling the transmission of microwave energy in a microstrip transmission line structure. The microwave switch comprises an electrically conducting ground plane in contact with one side of an undoped semiconductor material having on its other side a superlattice of gallium arsenide consisting of a periodic sequence of p- and n-doped gallium arsenide layers. P- and n-type regions are formed integral with and electrically connected to the superlattice, and first and second microstrip transmission lines are electrically connected to respective ones of the n- and p-type regions.
- Electrical and Electronic Equipment