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Accession Number:
ADD014797
Title:
Volatile Divalent Metal Alkoxides.
Descriptive Note:
Patent, Filed 31 Jul 89, patented 1 Jan 91,
Corporate Author:
DEPARTMENT OF THE NAVY WASHINGTON DC
Report Date:
1991-01-01
Pagination or Media Count:
7.0
Abstract:
The invention related to precursors useful for the preparation by CVD of superconducting thin films. The precursors are the volatile alkoxides of the formula MOR2, wherein M is selected from the group consisting of Ba, Ca, and Sr, and R is selected from the group consisting of unsubstituted alkyl groups of 6 to 13 carbons and halogen substituted alkyl groups of 3 to 4 carbons wherein the halogen is selected from the group consisting of fluoride and chlorine and at least two of the halogen substitutions are fluorine. The secondary or tertiary alkyl groups are preferred and the tertiary alkyl groups are most preferred.
Distribution Statement:
APPROVED FOR PUBLIC RELEASE