Accession Number:

ADD014498

Title:

Formation of High T(c) Superconducting Films by Organometallic Chemical Vapor Deposition.

Descriptive Note:

Patent Application, Filed 16 May 89,

Corporate Author:

DEPARTMENT OF THE NAVY WASHINGTON DC

Report Date:

1989-05-16

Pagination or Media Count:

25.0

Abstract:

This invention relates to a method of forming high Tc superconducting films by organometallic chemical vapor deposition. More specifically, this invention relates to a method of forming superconducting films on a semiconductor surface by chemical vapor deposition of volatile organometallic compounds of the rare earth and alkaline earth elements, and copper. Keywords Reports, Periodicals, Military publications, Scientific literature. eg

Subject Categories:

  • Information Science

Distribution Statement:

APPROVED FOR PUBLIC RELEASE