Accession Number:

ADD014498

Title:

Formation of High T(c) Superconducting Films by Organometallic Chemical Vapor Deposition.

Descriptive Note:

Patent Application, Filed 16 May 89,

Corporate Author:

DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s):

• Berry, Alan
• Gaskill, David
• Holm, Ronald
• Cukauskas, Edward

Report Date:

1989-05-16

Pagination or Media Count:

25.0

Abstract:

This invention relates to a method of forming high Tc superconducting films by organometallic chemical vapor deposition. More specifically, this invention relates to a method of forming superconducting films on a semiconductor surface by chemical vapor deposition of volatile organometallic compounds of the rare earth and alkaline earth elements, and copper. Keywords Reports, Periodicals, Military publications, Scientific literature. eg

Descriptors:

• *CHEMICAL REACTIONS
• *FILMS
• *ORGANOMETALLIC COMPOUNDS
• *SUPERCONDUCTORS
• *VAPOR DEPOSITION
• ALKALINE EARTH COMPOUNDS
• COPPER
• MILITARY PUBLICATIONS
• RARE EARTH ELEMENTS
• SCIENTIFIC LITERATURE
• SEMICONDUCTORS
• SURFACES
• VOLATILITY

Subject Categories:

• Information Science

Distribution Statement:

APPROVED FOR PUBLIC RELEASE