Method of Preparing a Thin Diamond Film.
Patent application filed 18 Dec 89,
DEPARTMENT OF THE ARMY WASHINGTON DC
Pagination or Media Count:
This patent application provides a method of making a diamond thin film that will be characterized by high thermal conductivity, large band gap, and high electron mobility, or the properties that are desired for electronic devices. A thin diamond film is prepared by immersing a substrate in a liquid containing carbon and hydrogen and then subjecting the substrate to at least one laser pulse. Keywords Excimer laser pulses Methanol pyrolysis. edc
- Manufacturing and Industrial Engineering and Control of Production Systems