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Accession Number:
ADD014105
Title:
Solid State Gas Pressure Sensor.
Descriptive Note:
Patent, Filed 14 May 87, patented 14 Mar 89,
Corporate Author:
DEPARTMENT OF THE AIR FORCE WASHINGTON DC
Report Date:
1989-03-14
Pagination or Media Count:
5.0
Abstract:
A solid state gas pressure sensor has a resistor of polysilicon deposited upon a dielectric substrate which electrically isolates and thermally prevents heat transfer to other devices thereon. A constant voltage is applied to the resistor. Depending upon the gas pressure over the sensor, a given current will be output once temperature equilibrium is established. A change in the gas pressure changes the output current of the resistor. The output current indicative of pressure is temperature corrected. Patents. MJM
Distribution Statement:
APPROVED FOR PUBLIC RELEASE