Accession Number:

ADD014105

Title:

Solid State Gas Pressure Sensor.

Descriptive Note:

Patent, Filed 14 May 87, patented 14 Mar 89,

Corporate Author:

DEPARTMENT OF THE AIR FORCE WASHINGTON DC

Report Date:

1989-03-14

Pagination or Media Count:

5.0

Abstract:

A solid state gas pressure sensor has a resistor of polysilicon deposited upon a dielectric substrate which electrically isolates and thermally prevents heat transfer to other devices thereon. A constant voltage is applied to the resistor. Depending upon the gas pressure over the sensor, a given current will be output once temperature equilibrium is established. A change in the gas pressure changes the output current of the resistor. The output current indicative of pressure is temperature corrected. Patents. MJM

Subject Categories:

  • Inorganic Chemistry
  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE