Accession Number:

ADD014105

Title:

Solid State Gas Pressure Sensor.

Descriptive Note:

Patent, Filed 14 May 87, patented 14 Mar 89,

Corporate Author:

DEPARTMENT OF THE AIR FORCE WASHINGTON DC

Personal Author(s):

• Halvis, James
• Bluzer, Nathan
• Shiskowski, Robert

Report Date:

1989-03-14

Pagination or Media Count:

5.0

Abstract:

A solid state gas pressure sensor has a resistor of polysilicon deposited upon a dielectric substrate which electrically isolates and thermally prevents heat transfer to other devices thereon. A constant voltage is applied to the resistor. Depending upon the gas pressure over the sensor, a given current will be output once temperature equilibrium is established. A change in the gas pressure changes the output current of the resistor. The output current indicative of pressure is temperature corrected. Patents. MJM

Descriptors:

• *DIELECTRICS
• *GASES
• *PATENTS
• *POLYSILICONS
• *PRESSURE
• *DETECTORS
• EQUILIBRIUM(GENERAL)
• HEAT TRANSFER
• OUTPUT
• RESISTORS
• SUBSTRATES
• TEMPERATURE
• VOLTAGE

Subject Categories:

• Inorganic Chemistry
• Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE