Fabrication of Semiconductor Devices in Recrystallized Semiconductor Films on Electrooptic Substrates.
Patent, Filed 3 Oct 83, patented 17 Mar 87,
DEPARTMENT OF THE NAVY WASHINGTON DC
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This invention relates to a process of manufacturing an integrated structure in which optical signals can be processed in a electrooptic material such as lithium tantalate and electrical signals can be processed in a semiconductor material such as silicon. Microelectronic semiconductors are fabricated in the semiconductor material and electrooptic devices are fabricated in the electrooptic material. Devices made by the process of the present invention are also disclosed.
- Solid State Physics
- Electrical and Electronic Equipment