Telescoping Low Vibration Pulling Mechanism for Czochralski Crystal Growth.
Patent, Filed 26 Feb 85, patented 5 May 87,
DEPARTMENT OF THE AIR FORCE WASHINGTON DC
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A telescoping low vibration puling mechanism is disclosed for use in Czochralski crystal growth apparatus, comprising a broached bushing which defines an internal circumference of teeth therein, which teeth cooperate with complimentary teeth defined on the curcumference of a splined shaft. The bushing is coupled to a motor drive via a hollow tube and the splined shaft, couplable to a seed shaft and an elevation assembly, telescopes through said bushing within said hollow tube.