Accession Number:

ADD013063

Title:

Method for Fabricating Superconducting Weak-Links Using Electron Beam Lithography.

Descriptive Note:

Patent, Filed 11 Jan 82, patented 2 Jul 85,

Corporate Author:

DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s):

Report Date:

1985-07-02

Pagination or Media Count:

5.0

Abstract:

A method for fabricating indium variable thickness superconducting microbridges uses a single layer of electron resist and EBL to draw a mask which has a gap with a small amount of undercut. A thin layer of material is deposited at normal incidence to form the bridge and material deposited at a sufficiently large oblique angle forms the banks separately. Typical VTBs have bridges 1000 A thick and 0.4 micrometers long with the banks 7 micrometers thick and R sub n approx. O.1 omega. The method can also form other non-hysteretic weak links such as the SNS junction. Author

Subject Categories:

  • Solid State Physics
  • Electricity and Magnetism
  • Particle Accelerators

Distribution Statement:

APPROVED FOR PUBLIC RELEASE