Passivation of Hybrid Microelectronic Circuits.
DEPARTMENT OF THE NAVY WASHINGTON DC
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Passivation of a hybrid microelectronic device is achieved by plasma polymerization of hexamethyldisilazane on the device surface. A moisture impermeable thin film layer is deposited which protects the moisture sensitive components from corrosion. The layer is readily removable, however, in order to effect repairs to the device when necessary.
- Electrical and Electronic Equipment