Method of Precisely Adjusting the Frequency of a Piezoelectric Resonator.
DEPARTMENT OF THE ARMY WASHINGTON DC
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The frequency of a piezoelectric resonator is precisely adjusted using monomolecular layers of a thermally stable, low stable, low stress, uniform insulating film deposited on the active area of the resonator. The method is particularly suitable for precisely adjusting the frequencies of high frequency i.e., very thin resonators, and the frequencies of lateral field resonators, without degrading stability.