Vanadium Dioxide Film Deposition.
DEPARTMENT OF THE NAVY WASHINGTON DC
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A method of producing high quality stoichiometric thin films of vanadium dioxide by reactive evaporations utilizes an electron beam to evaporate a source of vanadium in a controlled, low pressure oxygen gas environment with the film being deposited at a predetermined rate onto a substrate which is heated to and maintained at a predetermined temperature above 500 C.
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