Photoionization Technique for Growth of Metallic Films.
DEPARTMENT OF THE AIR FORCE WASHINGTON DC
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A novel method and system for depositing films of selected metallic or semiconductor materials, and particularly of the group III, IV, and V elements is described which comprises heating a halide compound of the material to produce vapor within a substantially closed chamber, irradiating the vapor with light of preselected wavelength to dissociatively photoionize the vapor into the constituent positive ions of the material and negative halogen ions, and subjecting the photoionized vapor to an electric field to selectively remove the positive ions of the material for plating as a film.
- Metallurgy and Metallography