Accession Number:

ADD012682

Title:

Radio Frequency Probing Apparatus for Surface Acoustic Wave Devices.

Descriptive Note:

Patent,

Corporate Author:

DEPARTMENT OF THE AIR FORCE WASHINGTON DC

Report Date:

1986-12-02

Pagination or Media Count:

13.0

Abstract:

Wafer probing apparatus especially adapted to probing surface acoustic wave SAW device die such as delay lines is disclosed the apparatus includes a probe card especially suited to the radio frequency and multiple output nature of a SAW delay line together with a computer-aided electronic system for exciting the delay line and evaluating its output.

Subject Categories:

  • Test Facilities, Equipment and Methods
  • Acoustics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE