Method for Forming High Superconducting Niobium Nitride Film at Ambient Temperature.
DEPARTMENT OF THE NAVY WASHINGTON DC
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A method of forming a high Tc niobium nitride NbN film on a substrate at ambient substrate temperature. The method includes the step of reactively sputtering NbN onto the substrate in an argon-nitrogen atmosphere with controlled amounts of methane added to the argon-nitrogen gas mixture. Author
- Electrical and Electronic Equipment
- Electricity and Magnetism
- Solid State Physics