Optical Lithographic Technique for Fabricating Submicron-Sized Josephson Microbridges.
DEPARTMENT OF THE NAVY WASHINGTON DC
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Planar superconducting-normal-superconducting SNS Josephson microbridges and superconducting quantum interference devices SQUIDs with bridge widths of about 0.2 microns and lengths of about 0.1 micron or less are fabricated with the aid of a technique referred to as shadow evaporation. The procedure permits the submicron dimensions to be set by edge film thickness and slant evaporation angle, both of which can be accurately measured. Microbridges have been constructed with vanadium banks or electrodes and gold-titanium bridges, although order materials can be used including superconducting metals for the bridge. It is expected that a refined version of this technique would be suitable for repeated batch fabrication of single and multiple Josephson microbridges. Author
- Electrical and Electronic Equipment