Accession Number:

ADD010814

Title:

Electron Beam Peripheral Patterning of Integrated Circuits.

Descriptive Note:

Patent Application,

Corporate Author:

DEPARTMENT OF THE ARMY WASHINGTON DC

Personal Author(s):

• Glendinning,W. B.

Report Date:

1984-01-25

Pagination or Media Count:

13.0

Abstract:

Descriptors:

• *Patent applications
• *Integrated circuits
• *Fabrication
• Photolithography
• Electron beams
• Replicas
• Microelectronics
• Silicon
• Wafers

Subject Categories:

• Electrical and Electronic Equipment
• Manufacturing and Industrial Engineering and Control of Production Systems
• Printing and Graphic Arts

Distribution Statement:

APPROVED FOR PUBLIC RELEASE