Accession Number:

ADD010814

Title:

Electron Beam Peripheral Patterning of Integrated Circuits.

Descriptive Note:

Patent Application,

Corporate Author:

DEPARTMENT OF THE ARMY WASHINGTON DC

Personal Author(s):

Report Date:

1984-01-25

Pagination or Media Count:

13.0

Abstract:

Subject Categories:

  • Electrical and Electronic Equipment
  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Printing and Graphic Arts

Distribution Statement:

APPROVED FOR PUBLIC RELEASE