Accession Number:
ADD010814
Title:
Electron Beam Peripheral Patterning of Integrated Circuits.
Descriptive Note:
Patent Application,
Corporate Author:
DEPARTMENT OF THE ARMY WASHINGTON DC
Personal Author(s):
Report Date:
1984-01-25
Pagination or Media Count:
13.0
Abstract:
Descriptors:
Subject Categories:
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems
- Printing and Graphic Arts