Method of Making Miniature High Frequency SC-Cut Quartz Crystal Resonators.
DEPARTMENT OF THE ARMY WASHINGTON DC
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Miniature high frequency SC-cut quartz crystal resonators are made form a plano-plano SC-cut quartz crystal wafer by chemically polishing the wafer then chemomechanically polishing the chemically polished wafer then chemically polishing the chemomechanically polished wafer depositing a suitable pattern of etch resist on the wafer using standard photolithographic techniques chemically polishing the wafer stripping the photoresist from the wafer placing a suitable evaporative mask pattern into intimate contact with the wafer depositing a suitable pattern of electrodes on the wafer testing the resonators so formed on the wafer selectively separating those resonators having the desired properties mounting the selected resonators into an enclosure adjusting the frequency of the selected resonators to the exact frequency desired and hermetically sealing the enclosure.
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