Accession Number:

ADD010712

Title:

Method of Making Miniature High Frequency SC-Cut Quartz Crystal Resonators.

Descriptive Note:

Patent Application,

Corporate Author:

DEPARTMENT OF THE ARMY WASHINGTON DC

Personal Author(s):

Report Date:

1983-12-08

Pagination or Media Count:

13.0

Abstract:

Miniature high frequency SC-cut quartz crystal resonators are made form a plano-plano SC-cut quartz crystal wafer by chemically polishing the wafer then chemomechanically polishing the chemically polished wafer then chemically polishing the chemomechanically polished wafer depositing a suitable pattern of etch resist on the wafer using standard photolithographic techniques chemically polishing the wafer stripping the photoresist from the wafer placing a suitable evaporative mask pattern into intimate contact with the wafer depositing a suitable pattern of electrodes on the wafer testing the resonators so formed on the wafer selectively separating those resonators having the desired properties mounting the selected resonators into an enclosure adjusting the frequency of the selected resonators to the exact frequency desired and hermetically sealing the enclosure.

Subject Categories:

  • Electrical and Electronic Equipment
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE