Recessed Interdigitated Integrated Capacitor.
DEPARTMENT OF THE NAVY WASHINGTON DC
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This document describes a large value capacitor having interdigitated electrodes embedded within a planar substrate of semiconductor material and a method for producing the capacitor are presented. Metallic material forming a plurality of isolated parallel spaced-apart planar recesses formed into the substrate from the planar surface by ion beam machining, etching, or the like. Alternate individual electrodes are electrically interconnected to form the interdigitated opposite electrodes of the capacitor with the dielectric comprising the high resistivity substrate material. Each of the interdigitated electrodes is connectable to other electronic members including members disposed on the same substrate. Author
- Electrical and Electronic Equipment