Accession Number:

ADD010412

Title:

Controlled Porosity Sheet for Thermionic Dispenser Cathode and Method of Manufacture.

Descriptive Note:

Patent,

Corporate Author:

DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s):

Report Date:

1983-04-12

Pagination or Media Count:

8.0

Abstract:

A controlled porosity sheet defining a surface for a thermionic dispenser cathode and a method of manufacture. Starting with a generally flat silicon template substrate structure having an array of upstanding microposts 1-25 microns across on 5-100 micron spacings from each other, a layer of metal is deposited on the substrate to surround the microposts and cover the substrate structure to a desired depth. The metal layer is then abraded to a smooth, flat surface which exposes the microposts. Thereafter, the silicon substrate and microposts. Thereafter, the silicon substrate and microposts are completely etched away, leaving a metal sheet having micron-size holes therethrough.

Subject Categories:

  • Electrical and Electronic Equipment
  • Fabrication Metallurgy
  • Mechanics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE