Accession Number:

ADD010299

Title:

Dual Species Ion Implantation into GAAS.

Descriptive Note:

Patent,

Corporate Author:

DEPARTMENT OF THE AIR FORCE WASHINGTON DC

Personal Author(s):

Report Date:

1983-05-31

Pagination or Media Count:

13.0

Abstract:

Subject Categories:

  • Particle Accelerators
  • Nuclear Physics and Elementary Particle Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE