Accession Number:

ADD009816

Title:

A Nozzle Beam Source for Vapor Deposition.

Descriptive Note:

Patent Application,

Corporate Author:

DEPARTMENT OF THE ARMY WASHINGTON DC

Personal Author(s):

Report Date:

1982-08-11

Pagination or Media Count:

7.0

Abstract:

A nozzle beam source for use in the vapor deposition of electrode materials such as gold, during the fabrication of precision quartz-crystal resonators, or the like is described. The nozzle beam source includes a graphite crucible and source tube, a tungsten wick within the source tube, and graphite-to-graphite mechanical seals.

Subject Categories:

  • Fabrication Metallurgy

Distribution Statement:

APPROVED FOR PUBLIC RELEASE