Accession Number:

ADD009440

Title:

Method of Forming Thin Niobium Carbonitride Superconducting Films of Exceptional Purity.

Descriptive Note:

Patent,

Corporate Author:

DEPARTMENT OF THE NAVY WASHINGTON DC

Report Date:

1981-07-21

Pagination or Media Count:

5.0

Abstract:

Thin superconducting NbCN films are deposited by reactive sputtering onto a dielectric substrate inside a vacuum chamber. The substrate is heated to a temperature of 600-1200 C ultra-pure Argon is introduced into the chamber, and niobium is presputtered from a high-purity target onto a shutter. A cyanogen and nitrogen gas mixture is introduced into the chamber at a rate of approximately 10-6 Torr literssec, and a shutter is opened exposing the substrate to the sputtered niobium. The deposited niobium reacts with the cyanogen-nitrogen gas mixture to form NbCN films of exceptional purity, and which exhibit superior superconductor properties. Author

Subject Categories:

  • Coatings, Colorants and Finishes
  • Electricity and Magnetism

Distribution Statement:

APPROVED FOR PUBLIC RELEASE