Method of Chemically Polishing Both Sides of an SC-Cut Quartz Crystal Plate.
DEPARTMENT OF THE ARMY WASHINGTON DC
Pagination or Media Count:
Both sides of an SC-cut quartz crystal plate whose theta angle is between about -33 degrees and -36 degrees and whose phi angles is between about 20 degrees and 26 degrees are chemically polished by lapping the quartz plate with an abrasive and etching the lapped quartz plate in a 25 to 30 percent solution of hydrofluoric acid HF in water, the etching being carried out until surface roughnesses of between 0.05 micrometers and 0.04 micrometers are obtained.
- Manufacturing and Industrial Engineering and Control of Production Systems