Method of Making Integrated Waveguide Cavities.
DEPARTMENT OF THE AIR FORCE WASHINGTON DC
Pagination or Media Count:
This invention provides a method for forming a waveguide cavity as a step in the process of diode fabrication. Semiconductor diodes are formed in a conventional manner. A plate of waveguide material having a thickness equivalent to waveguide height and slots corresponding to waveguide width is bonded to a semiconductor wafer containing a number of diodes. The slots are formed to correspond to rows of diodes, so that when bonded the diodes are centered in the slot. The package may then be divided as needed and the sides and thickness of the slot form the waveguide. Author
- Electrical and Electronic Equipment